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MOEMS and miniaturized systems. Proceedings
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Title
MOEMS and miniaturized systems. Proceedings
Title Supplement
18-19 Sept. 2000, Santa Clara, Calif.
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Publisher
SPIE
Publishing Place
Bellingham, WA
Publication Date
2000
Series
Proceedings of SPIE; 4178
ISBN
0-8194-3834-0
Conference
Conference on MOEMS and Miniaturized Systems 2000