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Title

MOEMS and miniaturized systems. Proceedings

Titel Supplements
18-19 Sept. 2000, Santa Clara, Calif.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2000
Serie
Proceedings of SPIE
ISBN
0-8194-3834-0
Konferenz
Conference on MOEMS and Miniaturized Systems 2000
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