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Title
MOEMS and miniaturized systems IV
Title Supplement
27 - 28 January 2004, San Jose, California, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2004
Series
Proceedings of SPIE; 5346
ISBN
0-8194-5254-8