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Micromachined Devices and Components II
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Title
Micromachined Devices and Components II
Institut
Sandia National Laboratories, Albuquerque/N.Mex
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
National Institute of Standards and Technology -NIST-
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
1996
Serie
Proceedings of SPIE
ISBN
0-8194-2280-0
Konferenz
Conference on Micromachined Devices and Components 1996
Symposium on Micromachining and Microfabrication 1996