Title

Micromachined Devices and Components II
Institut
Sandia National Laboratories, Albuquerque/N.Mex
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
National Institute of Standards and Technology -NIST-
Verlag
Verlagsort
Bellingham, WA
Datum
1996
Serie
Proceedings of SPIE
ISBN
0-8194-2280-0
Konferenz