Title

Laser-based Micro- and Nanopackaging and Assembly VI

Title Supplement

San Francisco, California, USA, January 2012

Editor(s)

Bachmann, F.G.

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8244

ISBN

978-0-8194-8887-9

Conference