Title

Lithographic and micromachining techniques for optical component fabrication

Title Supplement

29 -30 July 2001, San Diego, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4440

ISBN

0-8194-4154-6

Conference