Title

Microelectromechanical systems - materials and devices

Title Supplement
Symposium held November 26 - 28, 2007, San Francisco, California, U.S.A.; Symposium DD, "Microelectromechanical Systems - Materials and Devices" was held ... at the 2007 MRS fall meeting
Person Involved
Corporate Author
Materials Research Society -MRS-
Publisher
Publishing Place
Warrendale, Pa.
Publication Date
2008
Series
Materials Research Society Symposium Proceedings; 1052
ISSN
0272-9172
ISBN
978-1-558-99990-9
Conference