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Title
IEEE 22nd International Conference on Micro Electro Mechanical Systems, MEMS 2009
Title Supplement
Proceedings of a meeting held 25-29 January 2009, Sorrento, Italy
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Publisher
Publishing Place
Piscataway, NJ
Publication Date
2009
ISBN
978-1-4244-2977-6
978-1-4244-2978-3