Title

Functional integration of opto-electro-mechanical devices and systems

Title Supplement

24 - 25 January 2001, San Jose, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4284

ISBN

0-8194-3962-2

Conference