Title

Third International Symposium on Laser Precision Microfabrication 2002. Proceedings

Title Supplement

27 - 31 May 2002, Osaka, Japan

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Japan Laser Processing Society -JLPS-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2003

Series

Proceedings of SPIE; 4830

ISBN

0-8194-4601-7

Conference