Title

Physics and Technology of High-k Gate Dielectrics 6

Title Supplement

214th ECS Meeting, October 12 - October 17, 2008, Honolulu

Honolulu, Hawaii, October 12, 2008 - October 17, 2008

Person Involved

Corporate Author

Electrochemical Society -ECS-

Publisher

Publishing Place

Pennington, NJ

Publication Date

2008

Series

ECS transactions; 16, 5

ISSN

1938-5862

Conference

DDC

660