Title

MEMS/MOEMS: Advanced in photonic communications, sensing, metrology, packaging and assembly

Title Supplement
28 - 29 October 2002, Brugge, Belgium
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2003
Series
Proceedings of SPIE; 4945
ISBN
0-8194-4740-4
Conference