Title

Dimensional measurements in the micro- and nanometre range

Title Supplement
Applications, challenges, state-of-the art. Proceedings of the 4th Seminar on Quantitative Microscopy
Person Involved
Publisher
Publishing Place
Bremerhaven
Publication Date
2000
Series
PTB-Berichte: Fertigungsmeßtechnik; F-39
ISBN
3-89701-503-X
Conference