Title

Microelectronic structures and MEMS for optical processing II

Title Supplement

14-15 October 1996, Austin, Texas

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1996

Series

Proceedings of SPIE; 2881

ISBN

0-8194-2279-7

Conference