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Micro Electro Mechanical Systems, MEMS 2001
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Title
Micro Electro Mechanical Systems, MEMS 2001
Titel Supplements
21 Jan 2001 - 25 Jan 2001, Interlaken
Verlag
IEEE
Verlagsort
Piscataway, NJ
Datum
2001
ISBN
0-7803-5998-4
Konferenz
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2001