Title

Advanced techniques for integrated circuit processing II

Title Supplement

21 - 23 September 1992, San Jose/Calif.

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1993

Series

Proceedings of SPIE; 1803

ISBN

0-8194-1001-2

Conference