Title

MOEMS and miniaturized systems VIII
Titel Supplements
27 - 28 January 2009, San Jose, California, USA
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2009
Serie
Proceedings of SPIE
ISBN
978-0-8194-7454-4
Konferenz