Title

54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2010. Papers

Title Supplement

01 June 2010 - 04 June 2010, Anchorage / U.S.A

Corporate Author

American Institute of Physics -AIP-, New York

Publisher

Publishing Place

Woodbury, N.Y.

Publication Date

2010

Series

Journal of vacuum science and technology. B, microelectronics and nanometers; 28.2010, Nr.6

ISSN

1071-1023

Conference