Title

54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2010. Papers
Titel Supplements
01 June 2010 - 04 June 2010, Anchorage / U.S.A
Institut
American Institute of Physics -AIP-, New York
Verlag
Verlagsort
Woodbury, N.Y.
Datum
2010
Serie
Journal of vacuum science and technology. B, microelectronics and nanometers; 28.2010, Nr.6
ISSN
1071-1023
Konferenz