Title

Advances in Resist Materials and Processing Technology XXIX

Title Supplement

San Jose, California, USA, February 2012

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8325

ISBN

978-0-8194-8981-4

Conference