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Title
Micromachining and Microfabrication Process Technology
Title Supplement
23-24 October 1995, Austin, Texas
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1995
Series
Proceedings of SPIE; 2639
ISBN
0-8194-2005-0