Title

Micromechanics. Special issue of the Micromechanics Section of Sensors and actuators (SAMM)

Title Supplement

Based upon contributions revised from the Technical Digest of the IEEE 16th International Conference on Micro Electro Mechanical Systems (MEMS-03), 19 - 23 January 2003, Kyoto, Japan

Person Involved

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Publisher

Elsevier

Publishing Place

Amsterdam

Publication Date

2004

Series

Sensors and actors. A, Physical; 111.2004, Nr.1

Conference

International Conference on Micro Electro Mechanical Systems (MEMS) 2003

Options

Micromechanics. Special issue of the Micromechanics Section of Sensors and actuators (SAMM)