Title

Atomic layer deposition applications 5

Title Supplement
Fifth Symposium on Atomic Layer Deposition was held on October 5 till 7, 2009 in Vienna, Austria as part of the 216th meeting of the Electrochemical Society
Editor(s)
Gendt, S. de
Corporate Author
Electrochemical Society -ECS-, Dielectric Science and Technology Division
Publisher
Publishing Place
Pennington
Publication Date
2009
Series
ECS transactions; 25,4
ISSN
1938-5862
ISBN
978-1-566-77741-4
978-1-60768-091-8
Conference
DDC
660