Title

Micro Electro Mechanical Systems 1999

Person Involved

Corporate Author

American Society of Mechanical Engineers -ASME-, Bioengineering Division

American Society of Mechanical Engineers -ASME-, Electrical and Electronic Packaging Division

American Society of Mechanical Engineers -ASME-, Fluids Engineering Division

American Society of Mechanical Engineers -ASME-, Heat Transfer Division

Publisher

Publishing Place

New York, NY

Publication Date

1999

ISBN

0-7918-1638-9