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Title
MAM2008, Proceedings of the Twelth European Workshop on Materials for Advanced Metallization 2008
Title Supplement
A single-session workshop devoted to materials research, materials properties and interactions. March 2 - 5, 2008, Dresden, Germany
Person Involved
Publisher
Publishing Place
Amsterdam
Publication Date
2008
Series
Microelectronic engineering; 85.2008, Nr.10
ISSN
0167-9317