Title

Micromechanics. Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM)

Title Supplement
Based on contributions revised from the technical digest of the IEEE 19th International Conference on Micro Electro Mechanical Systems (MEMS-2006), Istanbul, Turkey, 22 - 26 January 2006
Person Involved
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Publisher
Publishing Place
Amsterdam
Publication Date
2007
Series
Sensors and actuators. A, Physical; 135.2007, Nr.1
Conference