Title

Dimensional Optical Metrology and Inspection for Practical Applications VIII

Title Supplement

16-17 April 2019, Baltimore, Maryland, United States

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2019

Series

Proceedings of SPIE; 10991

ISBN

978-1-5106-2647-8

978-1-5106-2648-5

Conference