Title

Dimensional Optical Metrology and Inspection for Practical Applications VII

Title Supplement

17-19 April 2018, Orlando, Florida, United States

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2018

Series

Proceedings of SPIE; 10667

ISBN

978-1-5106-1846-6

978-1-5106-1845-9

Conference