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Title
Nanoscale calibration - standards and methods
Title Supplement
Dimensional and related measurements in the micro- and nanometer range. Proceedings, NanoScale 2004, March 25th and 26th, 2004, Braunschweig
Person Involved
Publisher
Publishing Place
Weinheim
Publication Date
2005
ISBN
3-527-40502-X
978-3-527-40502-2