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Micromachined devices and components IV
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Title
Micromachined devices and components IV
Titel Supplements
21-22 September 1998, Santa Clara, California
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
1998
Serie
Proceedings of SPIE
ISBN
0-8194-2973-2
Konferenz
Micromachining and Microfabrication Symposium 1998