Title

Micromachined devices and components IV
Titel Supplements
21-22 September 1998, Santa Clara, California
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
1998
Serie
Proceedings of SPIE
ISBN
0-8194-2973-2
Konferenz