Title

Micro- and nanoelectronics 2003
Titel Supplements
6 - 10 October 2003, Zvenigorod, Russia ; ICMNE-2003
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2004
Serie
Proceedings of SPIE
ISBN
0-8194-5324-2
Konferenz