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Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
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Title
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Verlag
Elsevier
Verlagsort
Amsterdam
Datum
1998
Serie
Microelectronic engineering
Konferenz
International Conference on Micro- and Nanofabrication (MNE) 1997
