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Title
Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004
Title Supplement
Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium F, held at the 2004 MRS spring meeting
Person Involved
Corporate Author
Materials Research Society -MRS-
Publisher
Publishing Place
Warrendale, Pa.
Publication Date
2004
Series
Materials Research Society symposia proceedings; 812
ISBN
1-558-99762-8