Title

Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004
Titel Supplements
Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium F, held at the 2004 MRS spring meeting
Institut
Materials Research Society -MRS-
Verlag
Verlagsort
Warrendale, Pa.
Datum
2004
Serie
Materials Research Society symposia proceedings
ISBN
1-558-99762-8
Konferenz