Title

Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004

Title Supplement

Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium F, held at the 2004 MRS spring meeting

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Warrendale, Pa.

Publication Date

2004

Series

Materials Research Society symposia proceedings; 812

ISBN

1-558-99762-8

Conference