Title

Nanoscale imaging and metrology of devices and innovative materials

Title Supplement

Proceedings of the European Materials Research Society 2006 - Symposium F, EMRS volume 195 ; Nice, France, 29 May - 2 June 2006

Person Involved

Corporate Author

European Materials Research Society -EMRS-

Publisher

Publishing Place

Amsterdam

Publication Date

2007

Series

Microelectronic engineering; 84.2007, Nr.3

Conference