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Title
Nanoscale imaging and metrology of devices and innovative materials
Title Supplement
Proceedings of the European Materials Research Society 2006 - Symposium F, EMRS volume 195 ; Nice, France, 29 May - 2 June 2006
Person Involved
Corporate Author
European Materials Research Society -EMRS-
Publisher
Publishing Place
Amsterdam
Publication Date
2007
Series
Microelectronic engineering; 84.2007, Nr.3