Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Hrsg
Gessner, Thomas
Institut
Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
