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Title
Smart Systems Integration 2013. CD-ROM
Title Supplement
Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Corporate Author
Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
MESAGO Messe Frankfurt GmbH, Stuttgart
Publisher
Publishing Place
Berlin
Publication Date
2013
ISBN
978-3-8007-3490-0