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27th European Mask and Lithography Conference 2011
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Title
27th European Mask and Lithography Conference 2011
Titel Supplements
18 - 19 January 2011, Dresden, Germany
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2011
Serie
Proceedings of SPIE
ISBN
978-0-8194-8553-3
Konferenz
European Mask and Lithography Conference (EMLC) 2011