Title

Microelectronic structures and MEMS for optical processing III
Titel Supplements
29-30 September 1997, Austin/Texas
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
1997
Serie
Proceedings of SPIE
ISBN
0-8194-2658-X
Konferenz