Modular System for Laser Microfabrication

A modular concept for laser microfabrication of microsystems is presented. Depending on the selected components, laser-induced processes with different applications can be accomplished with a single system. For example, a system based on a cw-pumped and frequency doubled Nd:YAG laser is presented which can be used for laser-induced deposition or etching of diverse materials, and is furthermore suited for marking, cutting, drilling or annealing processes. In combination with a guiding system including beam deflection and focussing optics, it is possible to direct the laser beam into two working stages for air or vacuum processes, alternatively. The substrate is loaded into the system by a standard mechanical interface facility. The system can operate standing alone but can also be integrated into a cluster tool arrangement.