: Schünemann, M.; Grimme, R.; Kaufmann, T.S.; Schwaab, G.; Bader, U.; Schäfer, W.; Dorner, J.

Abstract
During the past few years, remarkable afforts have been made for the ralization of microscale sensors, actuators and microelectromechanical systems. Due to advances in solid state and micromachining technologies, significant advances in designing, fabricating and testing of microminiaturized devices have been achieved at laboratory level. However, the technical and economical realization of microelectromechanical systems is considerably impeded by the lack of satisfying device technology for their industrial production. A production concept for the industrial production of hybrid microelectromechanical systems was developed and investigated. The concept is based on the resources and requirements of medium-sized enterprises and is characterized by its flexibility. Microsystem fab rication is separated into mecrofabrication steps performed in-house and tehcnological steps performed by external technology providers. The modularity of the concept allows for a gradual increase in the degree of automatison and the in-house production depth, depending on market capacity and financial resources. To demonstrate the feasibility of the approach, the design and realization of a microfabrication process center, which includes tasks like transport and handling, processing, cleaning, testing and storing are discussed. Special attention is given to the supply and feeding of micropartsa, to the necessary magazines, trays and transport systems, to the implementation of homogeneous mechanical, environmental and information interfaces, to the employment of advanced control, scheduling, and lot tracking concepts, and to the application of highly modular and cost-efficient clean production concepts.