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  4. Fundamental Principles of Cleanrooms Technology
 
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1998
Conference Paper
Title

Fundamental Principles of Cleanrooms Technology

Other Title
Grundlagen der Reinraumtechnik
Abstract
The paper gives an overview about the fundamental principles of cleanroom technology. It's shown where the cleanroom technology is used and what are the main contaminants and where they are coming from. The different cleanroom classes are described and different cleanroom concepts in practice are shown.
Author(s)
Dorner, J.
Mainwork
CleanRooms Europe 1998. Proceedings  
Conference
International Conference on Advanced Technologies and Practices for Contamination Control 1998  
Language
English
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA  
Keyword(s)
  • airflow

  • contamination

  • Kontamination

  • Kontaminationsquelle

  • Luftströmung

  • Oberflächeneigenschaften

  • Oberflächenreinheit

  • particle

  • Reinraumtechnik

  • Surface Cleanliness

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