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  4. Plasma-activated direct bonding of coated optical glasses
 
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2019
Conference Paper
Title

Plasma-activated direct bonding of coated optical glasses

Abstract
For spectrometric applications in space the benefits of direct bonding are highly promising. However, direct bonding of optical coatings is still challenging. This work presents investigations on plasma-activated direct bonding of optical glasses without and with added optical coatings. Gained technologies will be used for novel coated prism spectrometers.
Author(s)
Birckigt, P.
Rothhardt, C.
Grabowski, K.
Jorke, K.
Schlegel, R.
Dreisow, F.
Kalkowski, G.
Risse, S.
Eberhardt, R.
Mainwork
6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019. Proceedings  
Funder
Bundesministerium für Wirtschaft und Energie BMWi (Deutschland)  
Conference
International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) 2019  
DOI
10.23919/LTB-3D.2019.8735181
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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