Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Plasma-activated direct bonding of coated optical glasses
| 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019. Proceedings : 21-25 May 2019, Kanazawa, Ishikawa, Japan
Piscataway, NJ: IEEE, 2019
ISBN: 978-4-904743-07-2
ISBN: 978-1-72810-387-7
pp.71 |
| International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) <6, 2019, Kanazawa> |
| Bundesministerium fur Wirtschaft und Energie BMWi (Deutschland)
18360 |
|
| English |
| Conference Paper |
| Fraunhofer IOF () |
Abstract
For spectrometric applications in space the benefits of direct bonding are highly promising. However, direct bonding of optical coatings is still challenging. This work presents investigations on plasma-activated direct bonding of optical glasses without and with added optical coatings. Gained technologies will be used for novel coated prism spectrometers.