Abstract
Due to its broad fields of applications, micro technology has become a key technology for the 21st century. In the scope of a successfully performed project for "Priniciples of universal device kit for micro-production", a simulation kit for testing and optimizing the tools and logistic concepts has been introduced by Fraunhofer IPA, Department Cleanroom Manufacturing.
In this paper the approach and results of the developed simulation kit will be presented. The goal of this study was to test the functionality and efficiency of different equipment configurations and logistic plans during development and planning phase by means ot this simulation kit. eM-Plant simulation software is used which benefits from an object-oriented and open system architecture and enables the user to create well-structured hierarchical simulation models. Based on this virtual simulation platform important manufacturing data like throughput, cycle time, equipment utilization as well as process controlling strategies can be determined for later application in production phase. By means of this simulation kit, development and optimization of new application for a tool and for factory logistics is also possible.