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Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements

Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
 
: Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton

:
Poster urn:nbn:de:0011-n-5151337 (532 KByte PDF)
MD5 Fingerprint: 5549a13de6873840270409146ab520ea
Erstellt am: 12.10.2018


2018, 1 Folie
European Conference on Silicon Carbide and Related Materials (ECSCRM) <12, 2018, Birmingham>
Englisch
Poster, Elektronische Publikation
Fraunhofer IISB ()

: http://publica.fraunhofer.de/dokumente/N-515133.html