Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Different HIPIMS techniques for reactive desposition of alumina

 
: Gerdes, H.

International Union for Vacuum Science, Technique and Applications -IUVSTA-:
72nd IUVSTA Workshop on Plasma‐assisted vapour deposition of oxide‐based thin films and coatings 2014 : 6-11 April 2014, Schloss Seggau, Austria
Leibnitz, 2014
S.38
Workshop on Plasma-Assisted Vapour Deposition of Oxide-Based Thin Films and Coatings <72, 2014, Schloss Seggau>
Deutsch
Konferenzbeitrag
Fraunhofer IST ()

: http://publica.fraunhofer.de/dokumente/N-296542.html