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Different HIPIMS techniques for reactive desposition of alumina
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2014
Conference Paper
Titel
Different HIPIMS techniques for reactive desposition of alumina
Author(s)
Gerdes, H.
Bandorf, R.
Hauptwerk
72nd IUVSTA Workshop on Plasma‐assisted vapour deposition of oxide‐based thin films and coatings 2014
Konferenz
Workshop on Plasma-Assisted Vapour Deposition of Oxide-Based Thin Films and Coatings 2014
Language
German
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST