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72nd IUVSTA Workshop on Plasma‐assisted vapour deposition of oxide‐based thin films and coatings 2014
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Title
72nd IUVSTA Workshop on Plasma‐assisted vapour deposition of oxide‐based thin films and coatings 2014
Titel Supplements
6-11 April 2014, Schloss Seggau, Austria
Institut
International Union for Vacuum Science, Technique and Applications -IUVSTA-
Verlagsort
Leibnitz
Datum
2014
Konferenz
Workshop on Plasma-Assisted Vapour Deposition of Oxide-Based Thin Films and Coatings 2014