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Ion projection lithography for nano-patterning

 
: Heuberger, A.; Brünger, W.

Merhari, L. ; Materials Research Society -MRS-:
Materials issues and modeling for device nanofabrication : Symposia held November 29 - December 2, 1999. Contains most of the papers that were presented during Symposium J, "Advanced Materials and Techniques for Nanolithography", and Symposium N, "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography", held at the 1999 MRS Fall Meeting
Warrendale, Pa.: Materials Research Society, 2000 (Materials Research Society Symposium Proceedings 584)
ISBN: 1-558-99492-0
S.3-10
Symposium J: "Advanced Materials and Techniques for Nanolithography" <1999, Boston/Mass.>
Symposium N: "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography" <1999, Boston/Mass.>
Materials Research Society (Fall Meeting) <1999, Boston/Mass.>
Englisch
Konferenzbeitrag
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/dokumente/N-22012.html