Materials issues and modeling for device nanofabrication
Titel Supplements
Symposia held November 29 - December 2, 1999. Contains most of the papers that were presented during Symposium J, "Advanced Materials and Techniques for Nanolithography", and Symposium N, "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography", held at the 1999 MRS Fall Meeting