2000
Conference Paper
Title

Simulation Based Decision Support for Future 300mm Automated Material Handling

Abstract
Intergrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions between material flow and factory performance. A generic model of a 300mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions.
Author(s)
Schulz, M.
Stanley, T.D.
Renelt, B.
Sturm, R.
Schwertschlager, O.
Mainwork
Conference
Open Access
DOI
Additional full text version
Language
English
Keyword(s)