Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Simulation Based Decision Support for Future 300mm Automated Material Handling

: Schulz, M.; Stanley, T.D.; Renelt, B.; Sturm, R.; Schwertschlager, O.

DOI: 10.1109/WSC.2000.899134

	Joines, J.A.: Winter Simulation Conference 2000. Conference proceedings. Vol.2 : The New Simulation Millenium. Orlando, FL, USA, 10-13 December 2000 New York: ACM, 2000 ISBN: 0-7803-6579-8 pp.1518-1522
	Winter Simulation Conference (WSC) <32, 2000, Orlando/Fla.>

	English
	Conference Paper, Electronic Publication
	Fraunhofer IPA ()
	automated material handling system; semiconductor manufacturing; wafer fabrication

Abstract
Intergrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions between material flow and factory performance. A generic model of a 300mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions.

: http://publica.fraunhofer.de/documents/N-5514.html