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Simulation Based Decision Support for Future 300mm Automated Material Handling

: Schulz, M.; Stanley, T.D.; Renelt, B.; Sturm, R.; Schwertschlager, O.

Fulltext (PDF; )

Joines, J.A.:
Winter Simulation Conference 2000. Conference proceedings. Vol.2 : The New Simulation Millenium. Orlando, FL, USA, 10-13 December 2000
New York: ACM, 2000
ISBN: 0-7803-6579-8
Winter Simulation Conference (WSC) <32, 2000, Orlando/Fla.>
Conference Paper, Electronic Publication
Fraunhofer IPA ()
automated material handling system; semiconductor manufacturing; wafer fabrication

Intergrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions between material flow and factory performance. A generic model of a 300mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions.