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Enhanced large signal performance of PZT thick film actuators for active micro-optics

: Ernst, Dörthe; Bramlage, Bernhard; Gebhardt, Sylvia; Schönecker, Andreas; Pabst, Oliver; Schreiner, Hans Jürgen

Postprint urn:nbn:de:0011-n-2874923 (3.0 MByte PDF)
MD5 Fingerprint: b0d44e09c6ad2c5f55675e73aa8fbe23
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Created on: 13.5.2015

Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 : 21-25 July 2013, Prague
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5996-2
International Symposium on Applications of Ferroelectric (ISAF) <2013, Prague>
Workshop on Piezoresponse Force Microscopy (PFM) <2013, Prague>
Conference Paper, Electronic Publication
Fraunhofer IKTS ()
actuator; cantilever; PZT; screen printing; thick film

Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 μm.