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Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

: Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XI : 24 - 25 January 2012, San Francisco, California
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8252)
ISBN: 978-0-8194-8895-4
Paper 82520C
MOEMS and Miniaturized Systems Conference <11, 2012, San Francisco/Calif.>
Photonics West Conference <2012, San Francisco/Calif.>
Conference Paper
Fraunhofer IPMS ()

A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers (FTS) - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5mm diameter. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 m amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. In this paper we discuss the thermal influences of packaging technology on MOEMS behaviors more detail.