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MOEMS and miniaturized systems XI
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Title
MOEMS and miniaturized systems XI
Titel Supplements
24 - 25 January 2012, San Francisco, California
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2012
Serie
Proceedings of SPIE
Konferenz
MOEMS and Miniaturized Systems Conference 2012
Photonics West Conference 2012