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A virtual equipment as a test bench for evaluating virtual metrology algorithms

 
: Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin

:
Postprint urn:nbn:de:0011-n-1953757 (647 KByte PDF)
MD5 Fingerprint: b750b5799541a9e04cd2ca9f3488b025
© 2011 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Created on: 18.2.2012


Jain, S. ; Institute of Electrical and Electronics Engineers -IEEE-:
Winter Simulation Conference, WSC 2011. Proceedings : 11-14 December 2011, Phoenix, Arizona
New York, NY: IEEE, 2011
ISBN: 978-1-4577-2109-0
ISBN: 978-1-4577-2108-3
ISBN: 1-4577-2108-2
pp.1888-1897
Winter Simulation Conference (WSC) <2011, Phoenix/Ariz.>
English
Conference Paper, Electronic Publication
Fraunhofer IISB ()
Virtual Equipment (VE); Virtual Metrology (VM)

Abstract
This paper presents a Virtual Equipment which serves as a testing environment for evaluating Virtual Metrology (VM) algorithms prior to their implementation into semiconductor fab structures. The Virtual Equipment merges statistical simulation with physical simulation to generate test data sets for various common and uncommon states of the processing equipment. The input data is based on history fab data and synthetically generated data. Main result of the presented work is the bidirectional link of statistical methods with physical simulations which is the core of the virtual test environment. The testing of VM algorithms can be controlled via a Graphical User Interface (GUI). A simplified physical simulation of a Chemical Vapor Deposition (CVD) reaction chamber is set up based on CAD dat a as an example of the physical simulation part.

: http://publica.fraunhofer.de/documents/N-195375.html